Description
Hamamatsu L11751-01 Flat Excimer is an RF discharge excimer lamp. With conventional dielectric barrier discharge, a needle-shaped microplasma discharge occurs at 10 kHz operation, which results in uneven illumination. By contrast, the Hamamatsu L11751-01 Flat Excimer lamp’s high-frequency RF discharge produces a cloudlike glow discharge at 2 MHz operation, which results in highly uniform illumination. This feature enables the excimer lamp to provide stable output with minimal flickering. Contact irradiation with conventional cylindrical bulbs can only be done directly under the middle of the lamp, which results in much of the UV light being wasted. With Hamamatsu’s Flat Excimer lamp has a flat, broad emitter area (length: 400 mm, width: 38 mm), which makes it possible to illuminate a large area at close distance.
Applications
- Modification
- Cleaning
- Bonding
Features
- Uniformly irradiates a large area by using a long flat lamp,
- Gives stable output with minimal flicker by using RF discharge,
- Power supply auto-tuning function for efficient light emission,
- Single wavelength at 172 nm allows highly efficient processing,
- Instantaneous lamp ON / OFF operation,
- No damage to object,
- No dust particle generation,
- No irregular processing.
Specifications
|
Parameter |
Description/ Value |
|
Rating |
180 W |
|
Emission wavelength |
172 nm |
|
Irradiance 1 |
50 mW/cm2 or more |
|
Lamp design life |
2000 h |
|
Oprating ambient Temperature / humidity |
+5 °C to +35 °C / below 60 % (no condensation) |
|
Storage ambient Temperature / humidity |
-25 °C to +55 °C / below 80 % (no condensation) |
|
Weight |
220 g |
—
