Description
Hamamatsu L11754 High Output Photoionizer eliminates electrostatic charges by utilizing a higher output than our previous PhotoIonizers. The L11754 also boosts static electricity removal performance to drastically shorten the charge removal time. Wide-ranging removal of electrostatic charges in a short time gives a vastly improved tact time on production lines.
Applications
- Dechucking of electrostatic chuck
- Semiconductor manufacturing equipment (vacuum process)
- Liquid crystal manufacturing equipment
- Organic EL manufacturing equipment
- Hard disk manufacturing equipment
- Film manufacturing equipment
- Equipment utilizing electron beams (SEM, etc.)
Features
- Maintenance-free operation,
- Zero dust generation,
- No overshooting (generating static charges of opposite polarity),
- No need for air flow,
- Quick removal of electrostatic charges for moving on high-speed production lines,
- Effectively removes static charges over a wide range with a small number of heads.
Specifications
|
Parameter |
Description / Value |
|
|
Ionization Method |
Soft X-ray exposure |
|
|
Ionization Source |
Type |
Soft X-ray tube |
|
Tube Voltage (DC) |
15 kV |
|
|
Beam Angle |
130° |
|
|
Input Voltage (AC) |
100 V to 240 V (50 Hz / 60 Hz) |
|
|
Power Consumption |
50 W Max. |
|
|
Weight |
Head |
1.73 kg |
|
Controller |
1.41 kg |
|
|
Operating Ambient Temperature |
0 °C to +40 °C |
|
|
Operating Ambient Humidity |
Below 60 % |
|
|
Storage Temperature |
-10 °C to +60 °C |
|
|
Storage Humidity |
Below 85 % |
|
