Description
Hamamatsu L12542 VUV ionizer is aN electrostatic charge remover that makes use of VUV (vacuum ultraviolet) light. Due to its wide irradiation angle about 3 times larger than other VUV light source, the L12542 efficiently removes electrostatic charges over large areas in depressurized or vacuum environments. Up until now two or more VUV light sources were needed to neutralize electrostatic charges in large areas due to their limited irradiation angle. The L12542 solves this problem and efficiently neutralizes large areas in a vacuum.
Applications
- Dechucking of electrostatic chucks,
- Semiconductor manufacturing equipment (vacuum process),
- LCD manufacturing equipment,
- Organic EL manufacturing equipment,
- Hard disk manufacturing equipment,
- Film manufacturing equipment.
Features
- Long life,
- Large irradiation (neutralizing) area,
- Highly efficient ion generation in a vacuum,
- No air flow needed,
- No overshoot (generates no opposite-polari- ty static charges),
- No dust and electromagnetic noise emissions.
Specifications
| Parameter | Description / Value | Unit | |
| Spectral distribution | 115 to 400 | nm | |
| Window material | MgF2 | — | |
| Cooling method | Air cooling by cooling fan | — | |
| Operating temperature range | +10 to +40 | °C | |
| Storage temperature range | 0 to +60 | °C | |
| Operating humidity range | Below 80 % (no condensation) | — | |
| Storage humidity range | Below 85 % (no condensation) | — | |
| Warm-up time | 25 ± 5 | s | |
| Light source service life 2 | 230 nm | 2000 (guaranteed) | h |
| 160 nm | 500 (expected) | ||
| Input voltage (AC) | 100 V to 240 V (100 V/200 V auto switching), single phase 50 Hz / 60 Hz | — | |
| Power consumption (Max.) | 90 | VA | |
